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Product Line-up - What are Sputtering targets?
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Sputtering targets
Sputtering targets
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Our Sputtering targets are created using the technical skills AGC Ceramics has gained through the development of diverse fine ceramic materials. They are of the highest quality and stability.
Using our advanced technical skills, all sputtering target-manufacturing processes (material processing, forming, burning, processing, and bonding) are carried out via integrated production. This makes the distribution of high quality and stability sputtering targets possible.

Also, with the development of our company's original large bonding equipment, we are capable of producing targets with a maximum size of 3.8m x 0.5m.

Furthermore, we provide customer-orientated technical support including: film evaluation, film deposition and arcing (abnormal electric discharge) prevention technologies. Also, through the design and production of our original sputter film deposition machines (cathode, power source, and others), we offer solid technical skills that satisfy our customer's needs.
What is sputtering?
By placing the sputtering target and board opposite to each other in a vacuum chamber and by increasing the voltage, the introduced gases such as argon becomes plasmic. During this process, the ions generated are accelerated by electric fields and hit the target. The target components rush out and stick to the board opposite to the target.
Sputtering is a method that by using this principle creates thin films on the board ranging from angstrom units to micron orders.
Material Material type Function of material Function of sputter film (Oxidation film) Main usages
DC film deposition Others Durability Refractive index Characteristic of film Others
Si Group ST Variable composition 1.7 - 2.0 Amorphous Colorless high transparent film Anti reflection films of products such as displays or touch-panels; infrared rays reflection films of automobiles and buildings; optical films.
SX Low arcing 1.7 Amorphous Colorless high transparent film
High hydrophobicity
SC SiO2high rate deposition.
Stable electric discharge
1.46 Amorphous SiO2Film
Ti Group TXO TiO2high rate deposition 2.45 Amorphous TiO2Film
Nb Group NBO Nb2O5high rate deposition 2.3 Amorphous Nb2O5Film
Zn Group GZO Arfilm deposition,
Low nodule
  1.9 Crystal Transparent conductive film Optical films of displays, transparent conductive films of solar cells, electric cars and anti-static coats.
AZO Arfilm deposition,
Low nodule
  1.9 Crystal Transparent conductive film
Sn Group
(In process of developing)
GIT Arfilm deposition,
Low nodule
2 Amorphous Transparent conductive film
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