Sputtering target of AGC Ceramics
Based on our fine ceramics technology cultivated over the years, we AGC ceramics produce sputtering target throughout total process such as raw materials processing, forming, sintering, machining and bonding. Therefore, the supply of the stable and high quality sputtering target as well as large size of plate with maximum size of 3.8m (in length) or 1.4m( in width) is possible to provide.
In addition, in response to the new current of adopting high efficient rotary cathode in late years, we provide integral molding type, thermal spray type and bonding type of cylindrical target by utilizing our original technology. The production of the cylindrical target with maximum size up to 3m in total length is possible.
On the other hand, we implement technical backup as the customer support such as film evaluation technology, deposition technology and arcing (abnormal discharge) prevention technology.
Planer type of sputtering target
Cylindrical sputtering target
The cylindrical target discharging electricity
Table of main products (Sputtering Target)
Material/
Product
name |
Shape
(※1) |
Material function |
Function of sputtering film
(oxide film) |
Main application |
| P |
C |
DC/MF
depo. |
Others |
Dura-
bility |
RI
(※2) |
Film
(※3) |
Si
type |
SC |
○ |
|
○ |
SiO2 rapid depo. |
○ |
1.46 |
A |
- Anti-reflective film for display
and touch panel
- Protective film for IR
reflective glass of vehicle
and building
- Optical film
|
| Stable discharge |
| SX |
○ |
|
○ |
Low
arcing |
◎ |
1.7 |
A |
| ST |
○ |
△ |
○ |
Variable compo. |
◎ |
1.7～
2.0 |
A |
Nb
type |
NBO |
○ |
○ |
○ |
Nb2O5
rapid depo. |
○ |
2.3 |
A |
Ti
type |
TXO |
○ |
○ |
○ |
TiO2 rapid depo. |
○ |
2.45 |
A |
Zn
type |
SZ |
○ |
○ |
○ |
ZnO-SnO2
rapid depo. |
|
2.0 |
A |
- Dielectric layer for Low-E
- Intermediate-refractive film
for optical film, e.g., Anti-
reflective film
|
| AZ |
○ |
△ |
○ |
ZnO-Al2O3
rapid depo. |
|
2.0 |
A |
| GZO |
○ |
|
○ |
few nodule |
|
1.9 |
C |
- Optical films for displays
- Transparent conductive films
for solar cells, electric vehicle
and film preventing static
electricity
|
| AZO |
○ |
△ |
○ |
few nodule |
|
1.9 |
C |
All productions above mentioned can be used with DC/MF power supply.
- 1 P:Planer type C:Cylindrical type △:Under development
- 2 Reflective Index
- 3 A:Amorphous C:Crystal
The data (in this catalog) represents typical values and should not be considered as guaranteed specifications. These typical values can be varied without any notice.