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It is a high density ZnO group target with a relative density of more than
90%. |
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Conductivity is high, and is suited for DC sputtering. |
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Great electrical investment is possible. (High rate deposition is possible). |
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Compared to the ITO, nodules are less likely to be generated, and a stable
electric discharge can be achieved. |
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Deposition in a pure argon atmosphere is possible. |
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A crystallized film is created via deposition even at room temperature. |