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Used for
- Transparent electrodes of glasses used for environment and energy purposes (such as the solar cell)
- Transparent electrodes of glasses used for displays (PDP, LCD)
- Transparent conductive films of glasses for automobiles and residences (such as heat ray reflection glass, heat generating surface of electric cars)
- Anti-static coats for fibers and films
Materials Product name Target material Characteristic of film
DC sputter Characteristics Conductivity Chemical stability Other characteristics
Zn Group GZO High density usable in argon gas only X crystallizing film
n=1.9
AZO High density usable in argon gas only X crystallizing film
n=1.9
Sn Group GIT(In developmental process)  High density (High resistance) SnO2Amorphous film
n=2.0
GZO, AZO
Characteristics

- It is a high density ZnO group target with a relative density of more than 90%.
- Conductivity is high, and is suited for DC sputtering.
- Great electrical investment is possible. (High rate deposition is possible).
- Compared to the ITO, nodules are less likely to be generated, and a stable electric discharge can be achieved.
- Deposition in a pure argon atmosphere is possible.
- A crystallized film is created via deposition even at room temperature.
GIT
Characteristics

- It is a high density SnO2 group target with a relative density of more than 90%.
- Conductivity is high, and is suited for DC sputtering.
- Compared to the ITO, a high rate deposition is possible.
- Gains an amorphous film through oxidation react-ability sputtering.
- The film gained by oxidation react-ability sputtering is a transparent conductive film with high resist-ability.
- The film gained by oxidation react-ability sputtering is resistant to grazing or scratching and is also resistant to chemicals.
>> Optical characteristic data for targets of transparent conductive films
>> Anti-electric data for targets of transparent conductive films
>> Deposition rate data
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