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Targets for high-durable protection films

Targets for transparent conductive films

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Used for

-	Protection films of surface-treated glass (colored glass, heat ray reflection glass) used for cars and residences.
-	Anti-reflecting films used for films for displays (touch-panels and others).
-	Protection films resisting friction and scratches used for barcode readers and glasses of copy-machines.
-	Protection films for other various films in need of protection from friction and scratches.

Material	Product name	Target		Film (If it is an oxidation film)
		DC sputter	Characteristics	Alkali-resistant	Acid-resistant	Anti-gauze and scratches	Others
Si Group	SX		High density				n=1.7 Amorphous
			Low arcing
	ST		High density				n=1.7 Amorphous
			high rate deposition( > SX)

SX
Characteristics

-	Conductivity is high; it is suited for DC sputtering, and enables low arcing.
-	Through oxidation react-ability sputtering, amorphous film is gained; and being flat and even, it possesses a resistance to friction.
-	The film gained by oxidation react-ability sputtering is clear with high permeability.
-	The film gained by oxidation react-ability sputtering is resistant to grazing or scratching and is also resistant to chemicals.

ST
Characteristics

-	It is capable of a higher rate deposition compared to the SX..
-	Conductivity is high, and it is suited for DC sputtering.
-	Through oxidation react-ability sputtering, amorphous film is gained, and being flat and even, it possesses a resistance to friction.
-	The film gained by oxidation react-ability sputtering is clear with high permeability.
-	The film gained by oxidation react-ability sputtering is resistant to graze or scratch and is also resistant to chemicals.
-	The film gained by oxidation react-ability sputtering is high hydrophobic.
-	The refractive index of the gained film can be changed to "2.0" in accord to the target composition.

>> Optical characteristic data
>> Deposition rate data
>> Film durability data