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Sputtering targets
Properties of target
Deposition rate data
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Deposition rate of SiO
2
film (dependence on power)
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Deposition rate of TiO
2
film formed from TXO (dependence of oxygen partial pressure)
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Deposition rate of Nb
2
O
5
film formed from NBO (dependence on power)
>>
Deposition rate of Nb
2
O
5
film formed from NBO (dependence of oxygen partial pressure)
>>
Deposition rate of GIT (dependence of oxygen partial pressure)
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Sputtering targets
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